AAO Structure
Nano porous structure
Nano ceramic structure that is glowed by Anodization
Nano size pore
Excellent thermal insulation properties via air in the pore
Very large surface area
Material SiAL2O3 Alumina(Al2O3) AAO
Thermal Conductivity
(W/m.K)

~ 129

~ 30

1.3
Pore diameter(nm) Surface area(cm2) Times
15 122,522 20,420
60 32,044 5,340
500 5,499 916
Anodizing Technology
Dimension : ~ Φ300㎜
Thickness Control : 1 ~ 200 um
Pore Size Control : 10 ~ 200 nm
Inter Pore Distance : 40 ~ 350 ㎚
Pore density : 109 ~ 1012 cm-2
Conical AAO
AAO Wafer Image
AAO Specification
Spec Pore Size(㎚) Interpore distance(㎚) Thickness(㎛) AAO Size
Small Pore AAO

10~20

40~60

~100

~200㎜  or ~ Φ300㎜

Small Pore AAO – BO*

Middle Pore AAO

40~60

100~120

~200

~200㎜  or ~ Φ300㎜

Middle Pore AAO – BO*
Large Pore AAO

100~200

350

~100

~60㎜  or ~ Φ100㎜

Large Pore AAO – BO*

AAO Mask Image
AAO Mask Image
MEMS patterning by AAO
Vertical etching technology
Nano mask using pore of AAO
AAO Mask Technology
Dimension : ~ Φ300㎜
Thickness Control : 1 ~ 200 um
Nano Hole Patterning: 10 ~ 200㎚
Micro Hole Patterning: 10㎛ ~