Part System Specification
2L Block MKS Special Anodization
3L Block
6L Block
8L Block
22L Block
30L Block
Part Process
Base PEDESTAL-200MM Etch Process
Part Process
R-BOT GAS INJECTION Etch Process kits
Part Process
E-MAX CATHODE LINER Etch Process kits
Part Process
Locker Valve Etch , CVD Slit Valce Door
Part Process
BAFFLE PLATE Anodizing + D.I Sealing
Part Process
P-5000 Chamber Etch chamber Anodizing
Part Process
ATTO HEATER 특정 Anodizing 조건 진행
Part Process
Forged HEATER 특정 Anodizing 조건 진행
Part Process
NOVELLUS HEATER 특정 Anodizing 조건 진행
Part Process
Cooling Plate 특정 Anodizing 조건 진행