Susceptor : Heat controller
Role
One of Process chamber parts that is worked as hot plate
Characteristic
Heat the process temperature around 300 ~ 400C
Key specification is uniformity, flatness, roughness and anodization
Mass production Gen1 – Gen8 currently
Diffuser : Gas injection parts
Role
Injecting process gas uniformly
Characteristic
Key specification is flatness, hole size and anodization
Mass production Gen1 – Gen8 currently
Backing Plate
Role
Role as path of gas injection from Diffuser.
Characteristic
Role as path of gas injection from Diffuser.
Shadow Frame : Glass fasten part
Role
Fasten the glass by pressing side
Characteristic
Rectangular shape with empty center. Part must be free of strain
Part must have excellent corrosion resistance